Combinatorial Sputtering
The animation displays the combinatorial sputtering procedure used by the Dahn Group at 麻豆传媒资源 University. In this example a ternary is being sputtered. The composition gradients are orthogonal to each other and a large continuous region of the composition space is produced in a single run. A typical run consists of thousands of revolutions leading to a micron thick film. The sputtering table (big rotating disc) is 40.6 cm wide.
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- Press "Components" to see the different components of the sputtering table
- Press "Sputter" to see an animation of a sputtering run